Published 1987
by Plenum Press in New York .
Written in English
Edition Notes
| Statement | edited by R.F.C. Farrow ... [et al.]. |
| Series | NATO ASI series., v. 163 |
| Contributions | Farrow, R. F. C. |
| Classifications | |
|---|---|
| LC Classifications | QC611.6.S9 N38 1986 |
| The Physical Object | |
| Pagination | ix, 552 p. : |
| Number of Pages | 552 |
| ID Numbers | |
| Open Library | OL2393225M |
| ISBN 10 | 0306426862 |
| LC Control Number | 87022766 |
Thin Film Growth Techniques for Low-Dimensional Structures Edited by R. F. C. Farrow and S. S. P. Parkin IBM Almaden Research Center San Jose, California P. J. Dobson and J. H. Neave Philips Research Laboratories Surrey, United Kingdom and A. S. Arrott Simon Fräser University Burnaby, Canada Plenum Press New York and London. Part one focuses on the theory of thin film growth, with chapters covering nucleation and growth processes in thin films, phase-field modelling of thin film growth and surface roughness evolution. Part two covers some of the techniques used for thin film growth, including oblique angle deposition, reactive magnetron sputtering and epitaxial growth of graphene films on single crystal metal . Abstract Many types of low-dimensional structures can now be grown in epitaxial semiconductor thin films using growth techniques such as molecular beam epitaxy (MBE) and metal-organic chemical vapour deposition (MOCVD) 1, by: 1. This chapter discusses the application of ultraviolet photoemission spectroscopy (UPS) and angle-resolved photoemission spectroscopy (ARPES) to study the electronic structure of thin films synthesized in situ using film growth techniques such as molecular beam epitaxy (MBE) and pulsed laser deposition (PLD).
Thin Film Growth Through Sputte ring Technique and Its Applications electrons can be made to circulate on a closed pa th on the target surface. This high current of electrons creates high-density plasma, from whic h ions can be extracted to sputter the target material, producing a magnetron sputter conf iguration (Penfold, ). Film Morphology Film Growth Techniques Characterization Conclusion * H.-J. Freund, Surface Science () - Clusters and islands on oxides: from catalysis via electronics and magnetism to optics ** J. T. Yates et al,Chem. Rev. () - Band Bending in Semiconductors: Chemical and Physical Consequences at Surfaces and Interfaces. THIN FILM DEPOSITION & VACUUM TECHNOLOGY Stefan Cannon Lofgran Department of Physics Bachelor of Science The study and development of thin lms via physical vapor deposition has played a signi cant role in the development of optical coatings, semiconduc-tors, and solar cells. Closely related to the study of thin lms is the de-. "Proceedings of a NATO Advanced Research Workshop on Thin Film Growth Techniques for Low-Dimensional Structures, held September , , at the University of Sussex, Brighton, United Kingdom"--Title page verso. "Published in cooperation with NATO Scientific Affairs Division." Description: ix, pages: illustrations ; 26 cm. Series Title.
Thin Film Growth • Thin film growth processes (3 stages) – 1. Production of appropriate atomic, molecular, or ionic species – 2. Transport of these species to substrate through a medium – 3. Condensation onto the substrate either directly or via a chemical or electrochemical reaction • Unit species lose their velocity component normal. ‘Well-ordered, and extraordinarily well-referenced chapters gives the reader an in-depth and bang-up-to-date guide to the fields covered.’ Ian Forbes Source: Materials World ‘John Venables provides a lively guide to the whole subject, including the underlying theoretical science, the essential technology, the maze of analytical methods, the growth of thin film materials, and many Author: John A. Venables. The low growth temperature avoids the decomposition of InN thin film [18] and an InNO complex is formed in the InN thin film due to oxygen out-diffusion from ZnO substrate [19]. The N 2 pressure. Thin Film Growth and Evolution. Thin Film Techniques. Steps of Thin Film Growth. 1. Absorption (physisorption) 2. Surface diffusion 3. Chemical bond formation (chemisorption) – Molecule-molecule or amorphous structure • Columns have voided boundaries. • Dome tops above columnsFile Size: KB.
